| 開講学期／Course Start | 2016年度／Academic Year 後期／Second |
|---|---|
| 開講曜限／Class period | 月/Mon 1 |
| 授業区分／Regular or Intensive | 週間授業/Regular |
| 対象学科／Department | 情報電子工学系専攻/Division of Information and Electronic Engineering |
| 対象学年／Year | 1年,2年 |
| 授業科目区分／Category | 博士前期課程 大学院自専攻科目 |
| 必修・選択／Mandatory or Elective | 選択/Elective |
| 授業方法／Lecture or Seminar | /Seminar |
| 授業科目名／Course Title | プラズマ工学特論/Advanced Plasma Electronics |
| 単位数／Number of Credits | 2.0 |
| 担当教員名／Lecturer | 植杉克弘(情報電子工学系学科電気電子工学コース)/Katsuhiro Uesugi |
| 時間割コード／Registration Code | MQ302 |
| 連絡先／Contact | |
| オフィスアワー／Office hours |
| 更新日／Date of renewal | 2016/06/21 |
|---|---|
| 授業のねらい ／Learning Objectives |
Plasma processes are indispensable for manufacturing the integrated circuits used by the electronic equipment. This course will provide the fundamental principles of chemical reactive plasma discharges and applications in microelectronics. The fundamental physical and chemical properties of plasma and thin-film processing such as surface etching and deposition will be studied. |
| 到達度目標 ／Outcomes Measured By: |
Understandings of fundamental principles of partially ionized plasma discharges, typical plasma sources used by the electronics industry, and applications in microelectronics. |
| 授業計画 ／Course Schedule |
Total number of class hours: 22.5 h (1.5h x 15) Course plan: 1. Introduction 2. Plasma fundamentals 3-5. Basic plasma equations and equilibrium 6-8. Atomic collisions 9-10. Plasma dynamics 11-12. Etching 13-14. Deposition and implantation 15. Applications in microelectronics |
| 参考書等 ／Required Materials |
Principles of plasma discharges and materials processing Michael A. Lieberman, Allan J. Lichtenberg Wiley-Interscience 2005(ISBN:9780471720010)
Lecture notes on principles of plasma processing Francis F. Chen and Jane P. Chang Kluwer Academic/Plenum Publishers 2002(ISBN:9780306474972) |
| 教科書・参考書に関する備考 | No text book. Relevant materials will be provided. |
| 成績評価方法 ／Grading Guidelines |
The score of each student is evaluated by presentations (50%) and reports (50%). A grade of more than 60 is accepted for a credit. |
| 学習・教育目標との対応 ／Learning and Educational Policy |
This class corresponds to the learning of specialized knowledge pertaining to electrical-energy techniques. |
| 備考 ／Notes |
Japanese language is mainly used for this lecture, however, reference materials, writing on blackboard, and oral presentation in English are provided briefly. |
| No. | 回（日時） ／Time (date and time) |
主題と位置付け（担当） ／Subjects and instructor's position |
学習方法と内容 ／Methods and contents |
備考 ／Notes |
|---|---|---|---|---|
| 該当するデータはありません | ||||